GAAS HALL-EFFECT DEVICES FABRICATED BY ION-IMPLANTATION TECHNIQUE

被引:10
作者
INADA, T
OHKUBO, T
KATO, S
KITAHARA, M
KANDA, Y
HARA, T
机构
[1] HAMAMATSU UNIV,SCH MED,HAMAMATSU 43131,JAPAN
[2] MATSUSHITA RES INST TOKYO INC,TAMA KU,KAWASAKI 214,JAPAN
关键词
D O I
10.1049/el:19780338
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:503 / 505
页数:3
相关论文
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INADA T, UNPUBLISHED
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EISEN, FH ;
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JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (05) :651-655
[4]  
SZE SM, 1968, SOLID STATE ELECTRON, V11, P539
[5]  
THANAILAKIS A, 1969, SOLID STATE ELECTRON, V13, P997
[6]   ION-IMPLANTED GAAS VARACTOR DIODES - CAPACITANCE UNIFORMITY [J].
TOYODA, N ;
NIIKURA, I ;
SHIMURA, Y ;
HOZUKI, T ;
SUGIBUCHI, H ;
MIHARA, M ;
HARA, T .
ELECTRONICS LETTERS, 1978, 14 (05) :152-154