DEPOSITION OF POLYTETRAFLUOROETHYLENE FILMS BY LASER ABLATION

被引：105

作者：

BLANCHET, GB

SHAH, SI

机构：

[1] E. I. DuPont de Nemours, Central Research Department, Wilmington

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 09期

关键词：

D O I：

10.1063/1.108514

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Films of polytetrafluoroethylene (PTFE) were deposited by laser ablation using the fourth harmonic, at 266 nm, of a Nd-YAG laser. The films are found to be stoichiometric with the correct optical properties. We suggest that UV absorption onsets the pyrolitic decomposition of PTFE leading to a monomer that subsequently repolymerizes onto a substrate.

引用

收藏

页码：1026 / 1028

页数：3

相关论文

共 20 条

[1] FLUOROCARBON FILMS SPUTTERED UNDER VARIOUS CONDITIONS [J].

BIEDERMAN, H .

THIN SOLID FILMS, 1978, 55 (03) :L11-L13

[2]

BIEDERMAN H, 1977, THIN SOLID FILMS, V41, P339

[3] EVAPORATION OF POLYTETRAFLUOROETHYLENE BY ELECTRON-BOMBARDMENT OF BULK MATERIAL [J].

DEWILDE, W .

THIN SOLID FILMS, 1974, 24 (01) :101-111

[4] FACTORS AFFECTING THE THERMAL STABILITY OF POLYTETRAFLUOROETHYLENE [J].

FLORIN, RE ;

WALL, LA ;

BROWN, DW ;

HYMO, LA ;

MICHAELSEN, JD .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS, 1954, 53 (02) :121-130

[5] SELF-DEVELOPING RESIST WITH SUBMICROMETER RESOLUTION AND PROCESSING STABILITY [J].

GEIS, MW ;

RANDALL, JN ;

DEUTSCH, TF ;

DEGRAFF, PD ;

KROHN, KE ;

STERN, LA .

APPLIED PHYSICS LETTERS, 1983, 43 (01) :74-76

[6]

HARROP R, 1969, THIN SOLID FILMS, V3, P118

[7] SPUTTERED AND PLASMA POLYMERIZED FLUOROCARBON FILMS [J].

HOLLAND, L ;

BIEDERMAN, H ;

OJHA, SM .

THIN SOLID FILMS, 1976, 35 (02) :L19-L21

[8]

HOLLAND L, 1973, NUCL INSTRUM METHODS, V3, P555

[9]

IUFF PP, 1968, VACUUM, V18, P437

[10]

LEE SM, 1971, INSUL CIRCUITS, V33