SPUTTERED AND PLASMA POLYMERIZED FLUOROCARBON FILMS

被引：39

作者：

HOLLAND, L ^{[1
]}

BIEDERMAN, H ^{[1
]}

OJHA, SM ^{[1
]}

机构：

[1] UNIV SUSSEX,SCH MATH & PHYS SCI,PLASMA TREATMENT LAB,BRIGHTON,ENGLAND

来源：

关键词：

D O I：

10.1016/0040-6090(76)90267-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L19 / L21

页数：3

共 5 条

[1] FLUOROCARBON COATINGS FOR WEAR APPLICATIONS
BUDINSKI, KG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04): : 786 - 789
[2] FRICTION OF SPUTTERED PTFE FILMS
HARROP, R
HARROP, PJ
[J]. THIN SOLID FILMS, 1969, 3 (02) : 109 - &
[3] HOLLAND L, 1973, NUCL INSTRUM METHODS, V3, P555
[4] LEE SM, 1971, INSUL CIRCUITS, P33
[5] COMPARISON OF RF SPUTTERED AND PLASMA POLYMERIZED THIN-FILMS OF TETRAFLUOROETHYLENE
TIBBITT, JM
SHEN, M
BELL, AT
[J]. THIN SOLID FILMS, 1975, 29 (02) : L43 - L45