PROPERTIES OF SN-DOPED INDIUM OXIDE COATINGS DEPOSITED ON POLYESTER FILM BY HIGH-RATE REACTIVE SPUTTERING

被引:30
作者
ITOYAMA, K
机构
[1] Toray Industries, Incorporated, Plastic Research Laboratories, Otsu, Shiga
关键词
films; inorganic; spectra; transmittance;
D O I
10.1149/1.2129111
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
[No abstract available]
引用
收藏
页码:691 / 694
页数:4
相关论文
共 11 条
[1]   TRANSPARENT HEAT MIRRORS FOR SOLAR-ENERGY APPLICATIONS [J].
FAN, JCC ;
BACHNER, FJ .
APPLIED OPTICS, 1976, 15 (04) :1012-1017
[2]   PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].
FAN, JCC ;
BACHNER, FJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1719-1725
[3]  
FRAZER DB, 1972, J ELECTROCHEM SOC, V119, P1368
[4]  
GROTH R, 1965, PHILIPS TECH REV, V26, P105
[5]  
METHA RR, 1972, J ELECTROCHEM SOC, V119, P752
[6]   CHARACTERIZATION OF TRANSPARENT CONDUCTIVE THIN-FILMS OF INDIUM OXIDE [J].
MOLZEN, WW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :99-102
[7]   THIN-FILM COATINGS IN SOLAR-THERMAL POWER-SYSTEMS [J].
PETERSON, RE ;
RAMSEY, JW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :174-181
[8]  
Sobajima S., 1974, JPN J APPL PHYS PT 1, V2, P475
[9]   TRANSPARENT CONDUCTIVE SN-DOPED INDIUM OXIDE COATINGS DEPOSITED BY REACTIVE SPUTTERING WITH A POST CATHODE [J].
THORNTON, JA ;
HEDGCOTH, VL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :117-121
[10]  
VANBOORT HJ, 1968, PHILIPS TECH REV, V29, P17