ABOUT THE FLUORINE CHEMISTRY IN MCVD - THE MECHANISM OF FLUORINE INCORPORATION INTO SIO2 LAYERS

被引：19

作者：

KIRCHHOF, J

UNGER, S

KNAPPE, B

KLEINERT, P

FUNKE, A

机构：

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1987年 / 22卷 / 04期

关键词：

D O I：

10.1002/crat.2170220409

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：495 / 501

页数：7

共 17 条

[1]

ABE K, 1976, 2ND EUR C OPT COMM P

[2] THE DESIGN AND FABRICATION OF MONOMODE OPTICAL FIBER [J].

AINSLIE, BJ ;

BEALES, KJ ;

DAY, CR ;

RUSH, JD .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1982, 18 (04) :514-523

[3] CHEMICAL-KINETICS OF REACTIONS OF SICL4, SIBR4, GECL4, POCL3, AND BCL3 WITH OXYGEN [J].

FRENCH, WG ;

PACE, LJ ;

FOERTMEYER, VA .

JOURNAL OF PHYSICAL CHEMISTRY, 1978, 82 (20) :2191-2194

[4] LONG WAVELENGTH PERFORMANCE OF OPTICAL FIBERS CO-DOPED WITH FLUORINE [J].

IRVEN, J ;

HARRISON, AP ;

SMITH, CR .

ELECTRONICS LETTERS, 1981, 17 (01) :3-5

[5]

Kawana A., 1982, Transactions of the Institute of Electronics and Communication Engineers of Japan, Section E (English), VE65, P529

[6] ABOUT THE FLUORINE CHEMISTRY IN MCVD - THE INFLUENCE OF FLUORINE DOPING ON SIO2 DEPOSITION [J].

KIRCHHOF, J ;

KLEINERT, P ;

UNGER, S ;

FUNKE, A .

CRYSTAL RESEARCH AND TECHNOLOGY, 1986, 21 (11) :1437-1444

[7]

KLEINERT P, 1980, CRYST RES TECHNOL, V15, pK85

[8]

MARSHALL A, 1985, 11TH EUR C OPT COMM

[9]

MARSHALL A, 1984, 10TH EUR C OPT COMM

[10] THERMODYNAMIC STABILITY AND INCORPORATION OF PHOSPHORUS INTO GERMANIUM-DOPED SILICA GLASS [J].

MCAFEE, KB ;

GAY, DM ;

WALKER, KL ;

HOZACK, RS .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1985, 68 (06) :359-362

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