ANALYSIS OF SUBSTRATE BENDING DURING EVAPORATION OF THIN-FILMS DUE TO A SMALL TEMPERATURE DIFFERENCE BETWEEN THE SUBSTRATE FACES

被引：9

作者：

LAUGIER, M

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(80)90230-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L11 / L14

页数：4

共 7 条

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