METHYL RADICAL FORMATION FROM FILAMENT PYROLYSIS OF ACETYLENE AND ACETYLENE HYDROGEN MIXTURES WITHIN QUARTZ TUBES

被引：13

作者：

VILLA, E

DAGATA, JA

HORWITZ, J

SQUIRE, D

LIN, MC

机构：

[1] Chemistry Division, Naval Research Laboratory, Washington, D.C.

[2] NRC/NRL Cooperative Research Associate, ONT/NRL Postdoctoral Research Associate, NIST, Gaithersburg, Maryland

[3] Fibertek Inc., Herndon, VA, 22070

[4] Department of Chemistry, Emory University, Atlanta, GA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 04期

关键词：

D O I：

10.1116/1.576569

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Resonance enhanced multiphoton ionization/mass spectrometry and electron impact/mass spectroscopy techniques have been used to probe products from the pyrolysis of C2H2/He and C2H2/H2/He mixtures in the presence of a hot filament in quartz tubes. Methyl radical was found to be the most prominent radical species. The CH3concentration was highly dependent on the carbon film deposited on the quartz wall, the wall temperature, and hydrogen concentration. The activation energy for the CH3formation, 39 ± 2 kcal/mol, was independent of the hydrogen concentration and tube diameter. © 1990, American Vacuum Society. All rights reserved.

引用

页码：3237 / 3240

页数：4

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