NONEQUILIBRIUM PLASMA KINETICS OF D(2) IN MAGNETIC MULTICUSP PLASMAS FOR D(-) PRODUCTION

被引:7
作者
GORSE, C [1 ]
BACAL, M [1 ]
CELIBERTO, R [1 ]
CAPITELLI, M [1 ]
机构
[1] UNIV BARI,DEPT CHEM,I-70126 BARI,ITALY
关键词
D O I
10.1016/0009-2614(92)85446-H
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Nonequilibrium plasma kinetics in magnetic multicusp D2 discharges relevant to D- production has been examined by solving the nonequilibrium vibrational kinetics of D2 coupled to the Boltzmann equation for the electron energy distribution function (eedf ) and by using complete sets of relevant cross sections involving vibrationally excited D2(v). The results show that D2 and H-2 discharges behave similarly. Differences up to a factor 2 have been found in the concentration of D- as compared with H-.
引用
收藏
页码:161 / 165
页数:5
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