METAL AND SALT CLUSTER FORMATION IN POLYMER-FILMS PRODUCED IN ARGON-C3F8 PLASMAS

被引：8

作者：

BUBECK, C ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP, SAN JOSE, CA 95193 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.570784

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：360 / 361

页数：2

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