CORRELATION BETWEEN BREAKDOWN AND PROCESS-INDUCED POSITIVE CHARGE TRAPPING IN THIN THERMAL SIO2

被引:57
作者
HOLLAND, S
HU, C
机构
[1] Univ of California, Berkeley, CA,, USA, Univ of California, Berkeley, CA, USA
关键词
D O I
10.1149/1.2108999
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
28
引用
收藏
页码:1705 / 1712
页数:8
相关论文
共 28 条
[1]  
Aslam M., 1983, Insulating Films on Semiconductors. Proceedings of the International Conference INFOS 83, P103
[2]   RADIATION-HARDENED CMOS-SOS LSI CIRCUITS [J].
AUBUCHON, KG ;
PETERSON, HT ;
SHUMAKE, DP .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1976, 23 (06) :1613-1616
[4]  
BALK P, 1984, SOLID STATE ELECTRON, V27, P709, DOI 10.1016/0038-1101(84)90019-4
[5]   ELECTRICAL TECHNIQUE TO MEASURE THE RADIATION SUSCEPTIBILITY OF MOS GATE INSULATORS [J].
BOESCH, HE ;
MCGARRITY, JM .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (06) :4814-4818
[6]   DIRECT MEASUREMENT OF THE ENERGY-DISTRIBUTION OF HOT-ELECTRONS IN SILICON DIOXIDE [J].
BRORSON, SD ;
DIMARIA, DJ ;
FISCHETTI, MV ;
PESAVENTO, FL ;
SOLOMON, PM ;
DONG, DW .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (03) :1302-1313
[7]  
CHEN IC, 1985, IEEE J SOLID-ST CIRC, V20, P333
[8]   PROCESS OPTIMIZATION OF RADIATION-HARDENED CMOS INTEGRATED-CIRCUITS [J].
DERBENWICK, GF ;
GREGORY, BL .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1975, 22 (06) :2151-2156
[9]   USE OF ELECTRON-TRAPPING REGION TO REDUCE LEAKAGE CURRENTS AND IMPROVE BREAKDOWN CHARACTERISTICS OF MOS STRUCTURES [J].
DIMARIA, DJ ;
YOUNG, DR ;
ORMOND, DW .
APPLIED PHYSICS LETTERS, 1977, 31 (10) :680-682
[10]   ELECTRON HEATING IN SILICON DIOXIDE AND OFF-STOICHIOMETRIC SILICON DIOXIDE FILMS [J].
DIMARIA, DJ ;
THEIS, TN ;
KIRTLEY, JR ;
PESAVENTO, FL ;
DONG, DW ;
BRORSON, SD .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1214-1238