HETEROEPITAXIAL GROWTH OF LOWER BORON PHOSPHIDE ON SILICON SUBSTRATE USING PH3-B2H6-H2 SYSTEM

被引:15
作者
TAKIGAWA, M [1 ]
HIRAYAMA, M [1 ]
SHOHNO, K [1 ]
机构
[1] SOPHIA UNIV,DEPT ELECTR,CHIYODA,TOKYO,JAPAN
关键词
D O I
10.1143/JJAP.12.1504
中图分类号
O59 [应用物理学];
学科分类号
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页码:1504 / 1509
页数:6
相关论文
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