EPITAXIAL GROWTH OF SILICON FROM THE PYROLYSIS OF MONOSILANE ON SILICON SUBSTRATES

[1] BACKMAN PW, 1929, J PHYS CHEM, V33, P447

[2] STUDY OF BACKGROUND STRUCTURE IN PLATINUM CARBON SHADOWING DEPOSITS [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1960, 11 (11): : 506 - 509

[3] CARROLL TJ, 1959, AD216523

[4] EPITAXIAL GROWTH OF SILICON BY HYDROGEN REDUCTION OF SIHCL3 ONTO SILICON SUBSTRATES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (10) : 957 - 962

[5] GROWTH MECHANISM AND DEFECT STRUCTURES IN EPITAXIAL SILICON [J]. PHILOSOPHICAL MAGAZINE, 1962, 7 (83): : 1847 - &

[6] The thermal decomposition of silane [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1936, 58 : 108 - 112

[7] THE HOT-WIRE PROCESS FOR ZIRCONIUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1953, 100 (03) : 120 - 125

[8] KAGDIS WA, 1962, MAY LOS ANG M EL SOC

[9] PREPARATION OF HIGH-PURITY SILICON FROM SILANE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (12) : 1114 - 1118

[10] Nomarski G., 1955, REV MET PARIS, V52, P121, DOI [10.1051/metal/195552020121, DOI 10.1051/METAL/195552020121]

[1] BACKMAN PW, 1929, J PHYS CHEM, V33, P447

[2] STUDY OF BACKGROUND STRUCTURE IN PLATINUM CARBON SHADOWING DEPOSITS [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1960, 11 (11): : 506 - 509

[3] CARROLL TJ, 1959, AD216523

[4] EPITAXIAL GROWTH OF SILICON BY HYDROGEN REDUCTION OF SIHCL3 ONTO SILICON SUBSTRATES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (10) : 957 - 962

[5] GROWTH MECHANISM AND DEFECT STRUCTURES IN EPITAXIAL SILICON [J]. PHILOSOPHICAL MAGAZINE, 1962, 7 (83): : 1847 - &

[6] The thermal decomposition of silane [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1936, 58 : 108 - 112

[7] THE HOT-WIRE PROCESS FOR ZIRCONIUM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1953, 100 (03) : 120 - 125

[8] KAGDIS WA, 1962, MAY LOS ANG M EL SOC

[9] PREPARATION OF HIGH-PURITY SILICON FROM SILANE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (12) : 1114 - 1118

[10] Nomarski G., 1955, REV MET PARIS, V52, P121, DOI [10.1051/metal/195552020121, DOI 10.1051/METAL/195552020121]