MEASUREMENT OF LATTICE TEMPERATURE DURING PULSED-LASER ANNEALING BY TIME-DEPENDENT OPTICAL REFLECTIVITY

被引：31

作者：

MURAKAMI, K

TAKITA, K

MASUDA, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 12期

关键词：

D O I：

10.1143/JJAP.20.L867

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L867 / L870

页数：4

相关论文

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[4] DYNAMIC BEHAVIOR OF MODE-LOCKED ND-YAG LASER ANNEALING IN ION-IMPLANTED SI, GAAS, AND GAP
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