CONTINUOUS ELLIPSOMETRIC DETERMINATION OF OPTICAL CONSTANTS AND THICKNESS OF A SILVER FILM DURING DEPOSITION

被引：33

作者：

YAMAGUCHI, T

YOSHIDA, S

KINBARA, A

机构：

来源：

关键词：

D O I：

10.1143/JJAP.8.559

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：559 / +

页数：1

共 22 条

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[9] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY
MCCRACKIN, FL
PASSAGLIA, E
STROMBERG, RR
STEINBERG, HL
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +
[10] Optical constants of transparent silver
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[J]. ZEITSCHRIFT FUR PHYSIK, 1933, 80 (3-4): : 161 - 177