ELASTIC RECOIL DETECTION ANALYSIS OF HYDROGEN ADSORBED ON SOLID-SURFACES

被引：39

作者：

OURA, K

NAITOH, M

SHOJI, F

YAMANE, J

UMEZAWA, K

HANAWA, T

机构：

[1] Faculty of Engineering, Osaka University, Suita, Osaka, 565

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 45卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(90)90816-D

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An experimental apparatus for quantitative analysis of hydrogen adsorbed on solid surfaces is described. Elastic recoil detection analysis (ERDA) by a 6 MeV F3+ ion beam determines the hydrogen coverage and a LEED-Auger system is used to monitor the order and cleanliness of the specimen surface. The method has been applied to a H/Si(111)-7 × 7 system. © 1990.

引用

页码：199 / 202

页数：4

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