ATOMIC-FORCE MICROSCOPE TIP RADIUS NEEDED FOR ACCURATE IMAGING OF THIN-FILM SURFACES

被引：44

作者：

WESTRA, KL

THOMSON, DJ

机构：

[1] UNIV MANITOBA,DEPT ELECT & COMP ENGN,WINNIPEG,MB R3T 5V6,CANADA

[2] ALBERTA MICROELECTR CTR,EDMONTON,AB T6G 2T9,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587495

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3176 / 3181

页数：6

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