CONTRAST IN THE ELECTRON-BEAM LITHOGRAPHY OF SUBSTITUTED AROMATIC HOMOPOLYMERS AND CO-POLYMERS

被引：32

作者：

FEIT, ED

THOMPSON, LF

WILKINS, CW

WURTZ, ME

DOERRIES, EM

STILLWAGON, LE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570376

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1997 / 2002

页数：6

共 20 条

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[6] SOL-GEL BEHAVIOR AND IMAGE-FORMATION IN POLY(GLYCIDYL METHACRYLATE) AND ITS COPOLYMERS WITH ETHYL ACRYLATE [J].

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[8]

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[9]

FEIT ED, 1978, Patent No. 4130424

[10]

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