TEMPERATURE AND ELECTRON-DENSITY MEASUREMENTS IN A HELIUM HYDROGEN CAPACITIVELY COUPLED MICROWAVE PLASMA

被引：32

作者：

MASAMBA, WRL ^{[1
]}

ALI, AH ^{[1
]}

WINEFORDNER, JD ^{[1
]}

机构：

[1] UNIV FLORIDA,DEPT CHEM,GAINESVILLE,FL 32611

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 1992年 / 47卷 / 04期

关键词：

D O I：

10.1016/0584-8547(92)80041-E

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

Various temperature and electron density measurements have been carried out in a capacitively coupled microwave plasma (CMP) with a mixture of hydrogen and helium as the plasma gas using a photodiode array spectrometer for detection. Fe I lines were used for excitation temperature, OH lines for rotational temperature and the H(beta) line for electron number density measurements. Rotational temperatures were found to be between 1800 K and 3000 K. excitation temperatures varied between 2000 K and 5000 K and electron number densities varied between 4 x 10(14) cm-3 and 9 x 10(14) cm-3, depending on operating conditions. The influence of power, observation position, solution uptake rate and carrier gas flow have been investigated.

引用

页码：481 / 491

页数：11

共 35 条

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[32] CHARACTERIZATION OF BROMINE AND CHLORINE ATOMIC EMISSION IN A REDUCED-PRESSURE INDUCTIVELY COUPLED (27 MHZ) HELIUM PLASMA [J].