HIGH RECORDING DENSITY OPTICAL DISC MASTERING

被引:8
作者
IIDA, T
HIGUCHI, T
SASAKI, H
OGOSHI, K
YOKOZEKI, S
机构
[1] Corporate Research and Development Laboratory, Pioneer Electronic Corporation, Tsurugashima, Saitama, 350-02
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 11B期
关键词
HIGH DENSITY MASTERING; AR LASER; CNR (CARRIER-TO-NOISE RATIO); SURFACE ROUGHNESS; MOLECULAR WEIGHT DISTRIBUTION; ABC PARAMETERS; SMALL FLUCTUATION; INHOMOGENEITY; PHOTOSENSITIVE COMPONENT;
D O I
10.1143/JJAP.32.5447
中图分类号
O59 [应用物理学];
学科分类号
摘要
Aiming at obtaining a high CNR (carrier-to-noise ratio) and four times higher recording density than that of the conventional Laser Disc, we have developed a mastering process for a Laser Beam Recorder utilizing an ultraviolet laser. A photoresist claiming high resolution and high CNR has been screened out from the photoresists available on the market. By the improvement of the photoactive component in the photoresist, a CNR of 61.5 Db was obtained in the case of the 4-times higher density.
引用
收藏
页码:5447 / 5448
页数:2
相关论文
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