MINIATURE HYBRID MICROWAVE ICS USING A NOVEL THIN-FILM TECHNOLOGY

被引:15
作者
EDA, K [1 ]
MIWA, T [1 ]
TAGUCHI, Y [1 ]
UWANO, T [1 ]
机构
[1] MATSUSHITA ELECT IND CO LTD,IMAGE TECHNOL RES LAB,KADOMA,OSAKA 571,JAPAN
关键词
D O I
10.1109/22.64579
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel thin-film technology for miniature hybrid microwave IC's is presented. All passive components, such as resistors and capacitors, are fully integrated on ordinary alumina ceramic substrates using the thin-film technology with very high yield. The numbers of parts and wiring processes were significantly reduced. This technology was applied to the fabrication of Ku-band solid-state power amplifiers.
引用
收藏
页码:1949 / 1956
页数:8
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