Artifact-free near-field optical imaging by apertureless microscopy

被引：85

作者：

Labardi, M

Patane, S

Allegrini, M

机构：

[1] Univ Pisa, Ist Nazl Fis Mat, I-56127 Pisa, Italy

[2] Univ Messina, Ist Nazl Fis Mat, I-98166 Messina, Italy

[3] Univ Messina, Dipartimento Fis MTFA, I-98166 Messina, Italy

来源：

APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 05期

关键词：

D O I：

10.1063/1.127064

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method for optical near field discrimination, leading to drastic artifact reduction in superresolved imaging by scanning interference apertureless microscopy is presented. The method relies on second harmonic detection of the modulated optical signal scattered by a vibrating silicon tip. An edge resolution of 15 nm, or 7 nm Rayleigh-type resolution, with optical contrast as high as 50%, has been obtained on aluminum projection pattern samples in the constant gap width mode. Our method has been determined not to be affected by topographical artifacts by constant height mode scans. (C) 2000 American Institute of Physics. [S0003-6951(00)03431-8].

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页码：621 / 623

页数：3

相关论文

共 15 条

[1] Optical contrast in apertureless microscopy [J].

Azoulay, J ;

Débarre, A ;

Richard, A ;

Tchénio, P .

APPLIED OPTICS, 2000, 39 (01) :129-134

[2] NEAR-FIELD OPTICAL MICROSCOPY BY LOCAL PERTURBATION OF A DIFFRACTION SPOT [J].

BACHELOT, R ;

GLEYZES, P ;

BOCCARA, AC .

MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1994, 5 (4-6) :389-397

[3] Observation of nanometer-scale optical property discrimination by use of a near-field scanning apertureless microscope [J].

Bridger, PM ;

McGill, TC .

OPTICS LETTERS, 1999, 24 (15) :1005-1007

[4] Apertureless near-field optical microscopy with differential and close-proximity detection [J].

Fukuzawa, K ;

Tanaka, Y .

APPLIED PHYSICS LETTERS, 1997, 71 (02) :169-171

[5] THEORY FOR THE APERTURELESS NEAR-FIELD OPTICAL MICROSCOPE - IMAGE-RESOLUTION [J].

GARCIA, N ;

NIETOVESPERINAS, M .

APPLIED PHYSICS LETTERS, 1995, 66 (25) :3399-3400

[6] Enhanced sensitivity near-field scanning optical microscopy at high spatial resolution [J].

Hamann, HF ;

Gallagher, A ;

Nesbitt, DJ .

APPLIED PHYSICS LETTERS, 1998, 73 (11) :1469-1471

[7] Influence of detection conditions on near-field optical imaging [J].

Hecht, B ;

Bielefeldt, H ;

Pohl, DW ;

Novotny, L ;

Heinzelmann, H .

JOURNAL OF APPLIED PHYSICS, 1998, 84 (11) :5873-5882

[8] Facts and artifacts in near-field optical microscopy [J].

Hecht, B ;

Bielefeldt, H ;

Inouye, Y ;

Pohl, DW ;

Novotny, L .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (06) :2492-2498

[9]

LABARDI M, 1999, P 10 INT C SCANN TUN, P618

[10] DEVELOPMENT OF A 500-A SPATIAL-RESOLUTION LIGHT-MICROSCOPE .1. LIGHT IS EFFICIENTLY TRANSMITTED THROUGH GAMMA-16 DIAMETER APERTURES [J].

LEWIS, A ;

ISAACSON, M ;

HAROOTUNIAN, A ;

MURAY, A .

ULTRAMICROSCOPY, 1984, 13 (03) :227-231