100 MHZ BAND ULTRASONIC TRANSDUCERS UTILIZING EPITAXIALLY GROWN ZNO FILMS

被引：5

作者：

KUSHIDA, K ^{[1
]}

TAKEUCHI, H ^{[1
]}

KANDA, H ^{[1
]}

YAMAGUCHI, S ^{[1
]}

机构：

[1] HITACHI CONSTRUCT MACHINERY CO LTD,TECHN RES LAB,TSUCHIURA,IBARAKI 300,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷

关键词：

D O I：

10.7567/JJAPS.28S1.260

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：260 / 262

页数：3

共 14 条

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[2] CHUBACHI N, 1974, JPN J APPL PHYS PT 1, V2, P737
[3] EPITAXIAL ZNO ON SAPPHIRE
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COKER, JE
[J]. APPLIED PHYSICS LETTERS, 1970, 16 (11) : 439 - &
[4] IRAN N, 1978, 1977 IEEE ULTR S P N, P305
[5] ORIENTATION RELATIONSHIPS OF ZINC-OXIDE ON SAPPHIRE IN HETERO-EPITAXIAL CHEMICAL VAPOR-DEPOSITION
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[J]. JOURNAL OF CRYSTAL GROWTH, 1981, 54 (02) : 185 - 194
[6] PERFORMANCE OF SPUTTERED SIO2 FILM AS ACOUSTIC ANTIREFLECTION COATING AT SAPPHIRE-WATER INTERFACE
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[J]. ELECTRONICS LETTERS, 1980, 16 (19) : 737 - 738
[7] MATERIAL CHARACTERIZATION BY LINE-FOCUS-BEAM ACOUSTIC MICROSCOPE
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CHUBACHI, N
[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (02): : 189 - 212
[8] CRYSTALLINE PROPERTIES OF RF-SPUTTERED ZNO FILM ON GOLD FILM ON FUSED QUARTZ
KUSHIDA, K
TAKEUCHI, H
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (04) : 1133 - 1135
[9] LEMONS RA, 1974, 1973 IEEE ULTR S P N, P18
[10] MINAKATA M, 1972, 33RD AUT M JAP SOC A