FIR MICROSCOPY

被引：54

作者：

KEILMANN, F

机构：

[1] Max-Planck-Institut für Festkörperforschung

来源：

INFRARED PHYSICS & TECHNOLOGY | 1995年 / 36卷 / 01期

关键词：

D O I：

10.1016/1350-4495(94)00066-T

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Focusing elements for FIR radiation are evaluated for their potential use in microscopy. We find that metallic waveguides offer the possibility of sub-micrometer resolution. We report new results on single-mode metal waveguide for CO2 laser beams. Further we demonstrate microscopy of finely structured semiconductor objects with sub-wavelength resolution, obtained with tapered coaxial metal tips at microwave and FIR frequencies.

引用

页码：217 / 224

页数：8

共 20 条

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