LASER FLUORESCENCE STUDIES OF NEUTRAL PARTICLES SPUTTERED FROM CR, CR2O3 AND CR3C2 TARGETS

被引：13

作者：

HUSINSKY, W

BETZ, G

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90275-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：165 / 168

页数：4

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[4]

GRUNZE M, 1982, CHEM PHYSICS SOLID S, V4

[5] VELOCITY-MEASUREMENTS OF SPUTTERED PARTICLES USING THE LASER-DOPPLER METHOD [J].

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NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3) :287-293

[6] VELOCITY DISTRIBUTIONS AND SPUTTERING YIELDS OF CHROMIUM ATOMS UNDER ARGON, OXYGEN AND CARBON ION-BOMBARDMENT [J].

HUSINSKY, W ;

BETZ, G ;

GIRGIS, I ;

VIEHBOCK, F ;

BAY, HL .

JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) :577-582

[7]

HUSINSKY W, 1984, J VAC SCI TECHNOL A, V2, P689

[8]

HUSINSKY W, 1985, J VAC SCI TECH B SEP

[9]

OECHSNER H, 1984, TOP CURR PHYS, V37, P63

[10]

PELLIN MJ, 1984, SURF SCI, V144, P619, DOI 10.1016/0039-6028(84)90123-7

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