VELOCITY DISTRIBUTIONS OF THE METAL ATOMS SPUTTERED FROM OXYGEN AND NITROGEN COVERED TI-SURFACE AND AL-SURFACE

被引：59

作者：

DULLNI, E

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 2卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(84)90276-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：610 / 613

页数：4

共 15 条

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