CARBON-K EDGE SPECTROSCOPY OF INTERNAL INTERFACE AND DEFECT STATES OF CHEMICAL VAPOR-DEPOSITED DIAMOND FILMS

被引：47

作者：

NITHIANANDAM, J

RIFE, JC

WINDISCHMANN, H

机构：

[1] USN, RES LAB, WASHINGTON, DC 20375 USA

[2] BP AMER, RES & DEV, CLEVELAND, OH 44128 USA

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 01期

关键词：

D O I：

10.1063/1.107349

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have made carbon K edge reflectivity and absorption measurements using synchrotron radiation on diamond crystals and chemical vapor deposited diamond films to determine their electronic structures. Our spectra of diamond films show that both sp2 and sp3 bonded carbon atoms are formed during initial nucleation and growth. Transmission spectra of a diamond film with 30 nm diameter crystallites show striking features below the carbon sp3 K edge due to internal interface states and/or defects. We compare these absorption features to x-ray absorption spectra of clean diamond (111) surface, graphite, and hydrocarbon gases to understand surface chemistry involved in the deposition process.

引用

收藏

页码：135 / 137

页数：3

相关论文

共 18 条

[1] X-RAY ABSORPTION FINE-STRUCTURE OF DIAMOND FILMS GROWN BY CHEMICAL VAPOR-DEPOSITION [J].

CAPEHART, TW ;

PERRY, TA ;

BEETZ, CB ;

BELTON, DN ;

FISHER, GB ;

BEALL, CE ;

YATES, BN ;

TAYLOR, JW .

APPLIED PHYSICS LETTERS, 1989, 55 (10) :957-959

[2] FINE-STRUCTURE AT CARBON 1S K EDGE IN VAPORS OF SIMPLE HYDROCARBONS [J].

EBERHARDT, W ;

HAELBICH, RP ;

IWAN, M ;

KOCH, EE ;

KUNZ, C .

CHEMICAL PHYSICS LETTERS, 1976, 40 (02) :180-184

[3] STRUCTURE AND BONDING OF HYDROCARBON PLASMA GENERATED CARBON-FILMS - AN ELECTRON-ENERGY LOSS STUDY [J].

FINK, J ;

MULLERHEINZERLING, T ;

PFLUGER, J ;

BUBENZER, A ;

KOIDL, P ;

CRECELIUS, G .

SOLID STATE COMMUNICATIONS, 1983, 47 (09) :687-691

[4]

FINK J., 1989, ADV ELEC ELEC PHYS, V75, P121

[5] AN ULTRAHIGH-VACUUM REFLECTOMETER-GONIOMETER FOR USE WITH SYNCHROTRON RADIATION [J].

HUNTER, WR ;

RIFE, JC .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) :465-468

[6] NORMALLY UNOCCUPIED STATES ON C(111) (DIAMOND) (2X1) - SUPPORT FOR A RELAXED PI-BONDED CHAIN MODEL [J].

KUBIAK, GD ;

KOLASINSKI, KW .

PHYSICAL REVIEW B, 1989, 39 (02) :1381-1384

[7] FERMI-LEVEL LOWERING AND THE CORE EXCITON SPECTRUM OF INTERCALATED GRAPHITE [J].

MELE, EJ ;

RITSKO, JJ .

PHYSICAL REVIEW LETTERS, 1979, 43 (01) :68-71

[8] C 1S EXCITATION STUDIES OF DIAMOND(111) .2. UNOCCUPIED SURFACE-STATES [J].

MORAR, JF ;

HIMPSEL, FJ ;

HOLLINGER, G ;

JORDON, JL ;

HUGHES, G ;

MCFEELY, FR .

PHYSICAL REVIEW B, 1986, 33 (02) :1346-1349

[9] C 1S EXCITATION STUDIES OF DIAMOND(111) .1. SURFACE CORE LEVELS [J].

MORAR, JF ;

HIMPSEL, FJ ;

HOLLINGER, G ;

JORDAN, JL ;

HUGHES, G ;

MCFEELY, FR .

PHYSICAL REVIEW B, 1986, 33 (02) :1340-1345

[10] OBSERVATION OF A C-1S CORE EXCITON IN DIAMOND [J].

MORAR, JF ;

HIMPSEL, FJ ;

HOLLINGER, G ;

HUGHES, G ;

JORDAN, JL .

PHYSICAL REVIEW LETTERS, 1985, 54 (17) :1960-1963