STRUCTURE AND TRIBOLOGICAL PERFORMANCE OF CARBON OVERLAYER FILMS

被引:15
作者
AGARWAL, S
LI, E
机构
[1] Akashic Memories Corporation, San Jose
关键词
D O I
10.1109/20.195580
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The structure and mechanical performance of sputtered amorphous and hydrogenated amorphous carbon films have been investigated. Raman spectroscopy of the overlayer films shows that the sp3 content of the hydrogenated amorphous carbon films was higher than that of the amorphous carbon films. The hydrogenated amorphous carbon films were harder than amorphous carbon films. The abrasion resistance and friction buildup characteristics in drag tests were also superior for hydrogenated carbon films. The experimental results suggest that tribochemical wear is the dominant wear mode in amorphous carbon films whereas abrasive wear may be the operative mode in hydrogenated amorphous carbon films.
引用
收藏
页码:264 / 269
页数:6
相关论文
共 18 条
[1]  
AGARWAL S, 1985, IEEE T MAGN, V21, P1529
[2]   MODELING STUDIES OF AMORPHOUS-CARBON [J].
BEEMAN, D ;
SILVERMAN, J ;
LYNDS, R ;
ANDERSON, MR .
PHYSICAL REVIEW B, 1984, 30 (02) :870-875
[3]   CHARACTERIZATION OF CHEMICAL BONDING AND PHYSICAL CHARACTERISTICS OF DIAMOND-LIKE AMORPHOUS-CARBON AND DIAMOND FILMS [J].
BHUSHAN, B ;
KELLOCK, AJ ;
CHO, NH ;
AGER, JW .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (02) :404-410
[4]  
BHUSHAN B, 1990, TRIBOLOGY MECHANICS
[5]   CHEMICAL-STRUCTURE AND PHYSICAL-PROPERTIES OF DIAMOND-LIKE AMORPHOUS-CARBON FILMS PREPARED BY MAGNETRON SPUTTERING [J].
CHO, NH ;
KRISHNAN, KM ;
VEIRS, DK ;
RUBIN, MD ;
HOPPER, CB ;
BHUSHAN, B ;
BOGY, DB .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2543-2554
[6]   EFFECTS OF SUBSTRATE-TEMPERATURE ON CHEMICAL-STRUCTURE OF AMORPHOUS-CARBON FILMS [J].
CHO, NH ;
VEIRS, DK ;
AGER, JW ;
RUBIN, MD ;
HOPPER, CB ;
BOGY, DB .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (05) :2243-2248
[7]  
JOSLIN JL, 1989, SPIE, V1050, P218
[8]  
LAUER JL, 1990, STLE SP29, P71
[9]  
LEE HJ, 1992, APR P INT C MET COAT, P610
[10]   STRUCTURE AND MECHANICAL-PROPERTIES OF HYDROGENATED CARBON-FILMS PREPARED BY MAGNETRON SPUTTERING [J].
MARCHON, B ;
VO, PN ;
KHAN, MR ;
AGER, JW .
IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :5160-5162