STRUCTURE AND MECHANICAL-PROPERTIES OF HYDROGENATED CARBON-FILMS PREPARED BY MAGNETRON SPUTTERING

Hydrogenated thin carbon films have been prepared by DC-magnetron sputtering in an hydrogen-containing Argon atmosphere. A monotonic decrease in friction buildup as well as an increase in abrasion resistance is observed for increasing hydrogen proportion in Argon, from 0 to 5%. At the same time, Raman data shows higher sp3 character and an increase in hydrogen content in the film, as monitored with FTIR, is observed. Resistivity measurements also show, a transition from conductor to insulator. For very high hydrogen content, the film becomes increasingly softer. These data are attributed to an initial increase in the sp3/sp2 bonding ratio, followed by a loss of three-dimensional cross-linking eventually leading to polymerization.