WEAR PROPERTIES OF TETRAHEDRALLY BONDED AMORPHOUS THIN-FILMS

被引:28
作者
JANSEN, F
MACHONKIN, MA
机构
关键词
D O I
10.1016/0040-6090(86)90266-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:227 / 235
页数:9
相关论文
共 16 条
[1]   MICROHARDNESS AND OTHER PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON CARBIDE THIN-FILMS FORMED BY PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION [J].
BAYNE, MA ;
KUROKAWA, Z ;
OKORIE, NU ;
ROE, BD ;
JOHNSON, L ;
MOSS, RW .
THIN SOLID FILMS, 1983, 107 (02) :201-206
[2]   RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].
BUBENZER, A ;
DISCHLER, B ;
BRANDT, G ;
KOIDL, P .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4590-4595
[3]   USE OF HYDROGENATION IN STRUCTURAL AND ELECTRONIC STUDIES OF GAP STATES IN AMORPHOUS-GERMANIUM [J].
CONNELL, GAN ;
PAWLIK, JR .
PHYSICAL REVIEW B, 1976, 13 (02) :787-804
[4]   INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J].
FREEMAN, EC ;
PAUL, W .
PHYSICAL REVIEW B, 1978, 18 (08) :4288-4300
[5]   SPUTTERED SILICON-NITRIDE COATINGS FOR WEAR PROTECTION [J].
GRILL, A ;
ARON, PR .
THIN SOLID FILMS, 1982, 96 (01) :25-30
[6]   THE EFFECTS OF HYDROGENATION ON THE PROPERTIES OF ION-BEAM SPUTTER DEPOSITED AMORPHOUS-CARBON [J].
JANSEN, F ;
MACHONKIN, M ;
KAPLAN, S ;
HARK, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :605-609
[7]   HARDNESS MEASUREMENTS OF THIN-FILMS [J].
JONSSON, B ;
HOGMARK, S .
THIN SOLID FILMS, 1984, 114 (03) :257-269
[8]   CHARACTERIZATION OF AMORPHOUS CARBON-HYDROGEN FILMS BY SOLID-STATE NUCLEAR MAGNETIC-RESONANCE [J].
KAPLAN, S ;
JANSEN, F ;
MACHONKIN, M .
APPLIED PHYSICS LETTERS, 1985, 47 (07) :750-753
[9]   ELECTRONIC-STRUCTURE OF HYDROGENATED AND UNHYDROGENATED AMORPHOUS SINX (0-LESS-THAN-X-LESS-THAN-1.6) - A PHOTOEMISSION-STUDY [J].
KARCHER, R ;
LEY, L ;
JOHNSON, RL .
PHYSICAL REVIEW B, 1984, 30 (04) :1896-1910
[10]   REQUIREMENTS FOR WEAR-RESISTANT COATINGS [J].
KRAMER, BM .
THIN SOLID FILMS, 1983, 108 (02) :117-125