WEAR PROPERTIES OF TETRAHEDRALLY BONDED AMORPHOUS THIN-FILMS

被引:28
作者
JANSEN, F
MACHONKIN, MA
机构
关键词
D O I
10.1016/0040-6090(86)90266-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:227 / 235
页数:9
相关论文
共 16 条
[11]   HYDROGEN CONTENT OF PLASMA-DEPOSITED SILICON-NITRIDE [J].
LANFORD, WA ;
RAND, MJ .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (04) :2473-2477
[12]  
MORT J, 1985, TETRAHEDRALLY BONDED, P531
[13]   PLASMA NITRIDE AR COATINGS FOR SILICON SOLAR-CELLS [J].
SEXTON, FW .
SOLAR ENERGY MATERIALS, 1982, 7 (01) :1-14
[14]   PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION PROCESSES AND THEIR SEMICONDUCTOR APPLICATIONS [J].
SHERMAN, A .
THIN SOLID FILMS, 1984, 113 (02) :135-149
[15]   NATURE OF DEFECTS IN AMORPHOUS GE-S AND SI-N [J].
SHIMIZU, T .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 71 (1-3) :145-155
[16]  
Weast R. C., 1983, CRC HDB CHEM PHYSICS, pF176