MECHANICAL-PROPERTIES OF DIAMONDLIKE CARBON-FILMS

被引：24

作者：

HOSHINO, S

FUJII, K

SHOHATA, N

YAMAGUCHI, H

TSUKAMOTO, Y

YANAGISAWA, M

机构：

[1] NEC CORP,FUNDAMENTAL RES LABS,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN

[2] NEC CORP,MICROELECTR RES LABS,MIYAMAE KU,KAWASAKI,KANAGAWA 23,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 05期

关键词：

D O I：

10.1063/1.342877

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1918 / 1922

页数：5

相关论文

共 30 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
AISENBERG, S
CHABOT, R
[J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +
[2] ANDERSON AC, 1981, AMORPHOUS SOLIDS LOW, P65
[3] DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA
BERG, S
ANDERSSON, LP
[J]. THIN SOLID FILMS, 1979, 58 (01) : 117 - 120
[4] STRUCTURE, OPTICAL-PROPERTIES AND DECOMPOSITION KINETICS OF SPUTTERED HYDROGENATED CARBON
CRAIG, S
HARDING, GL
[J]. THIN SOLID FILMS, 1982, 97 (04) : 345 - 361
[5] FUJI K, 1987, MATER RES SOC S P, V75, P765
[6] THERMAL-DIFFUSIVITY MEASUREMENT OF THIN-FILMS BY MEANS OF AN AC CALORIMETRIC METHOD
HATTA, I
SASUGA, Y
KATO, R
MAESONO, A
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (08) : 1643 - 1647
[7] ELECTRICAL, STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON
HAUSER, JJ
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1977, 23 (01) : 21 - 41
[8] TETRAHEDRAL CARBON-FILM BY HYDROGEN GAS REACTIVE RF-SPUTTERING OF GRAPHITE ONTO LOW-TEMPERATURE SUBSTRATE
HIRAKI, A
KAWANO, T
KAWAKAMI, Y
HAYASHI, M
[J]. SOLID STATE COMMUNICATIONS, 1984, 50 (08) : 713 - 716
[9] GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA
HOLLAND, L
OJHA, SM
[J]. THIN SOLID FILMS, 1979, 58 (01) : 107 - 116
[10] CHARACTERIZATION OF AMORPHOUS CARBON-HYDROGEN FILMS BY SOLID-STATE NUCLEAR MAGNETIC-RESONANCE
KAPLAN, S
JANSEN, F
MACHONKIN, M
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (07) : 750 - 753