INSITU MASS-SPECTROSCOPY AND THERMOGRAVIMETRIC STUDIES OF GAAS MOCVD GAS-PHASE AND SURFACE-REACTIONS

被引：131

作者：

LEE, PW ^{[1
]}

OMSTEAD, TR ^{[1
]}

MCKENNA, DR ^{[1
]}

JENSEN, KF ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF CRYSTAL GROWTH | 1987年 / 85卷 / 1-2期

关键词：

The authors are grateful to the National Science Foundation and the University of Minnesota Microelectronics and Information Sciences Center for support of this work. Support from Amoco in the early stages of the mass spectroscopy work is also gratefully acknowledged;

D O I：

10.1016/0022-0248(87)90218-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：165 / 174

页数：10

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