ANNEALING BEHAVIOUR IN VACUUM-DEPOSITED FILMS OF SILICON OXIDE

被引:13
作者
MORLEY, AR
CAMPBELL, DS
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D O I
10.1016/0040-6090(68)90054-0
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T [工业技术];
学科分类号
08 ;
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页码:403 / +
页数:1
相关论文
共 18 条
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