SENSITIVITY OF RESIST-COATED SILICON SLICES TO ARGON-LASER WAVELENGTHS

被引：2

作者：

BEESLEY, MJ

CASTLEDINE, JG

COOPER, DP

机构：

[1] Services Electronics Research Laboratory Baidock, Herts.

来源：

ELECTRONICS LETTERS | 1969年 / 5卷 / 12期

关键词：

D O I：

10.1049/el:19690197

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The threshold energy density required to expose a given thickness of resist is determined, over a range of intensities, for three different resists and several argon-laser wavelengths. © 1969, The Institution of Electrical Engineers. All rights reserved.

引用

页码：257 / +

页数：1