RECIPE TO MINIMIZE TE PRECIPITATION IN CDTE AND (CD,ZN)TE CRYSTALS

被引:76
作者
VYDYANATH, HR
ELLSWORTH, J
KENNEDY, JJ
DEAN, B
JOHNSON, CJ
NEUGEBAUER, GT
SEPICH, J
LIAO, PK
机构
[1] USA,CTR NIGHT VIS & ELECTROOPT,FT BELVOIR,VA 22060
[2] II-VI INC,SAXONBURG,PA 16056
[3] TEXAS INSTRUMENTS INC,DALLAS,TX 75265
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.586275
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using a quasichemical approach, the total native defect concentration and the minimum deviation in stoichiometry have been calculated in CdTe crystals as a function of the Cd pressure at various temperatures. With this knowledge, CdTe and (Cd,Zn)Te wafers have been subjected to postgrowth step annealing treatment under conditions such that the crystals are in equilibrium with a Cd or (Cd,Zn) vapor corresponding to the minimum in deviation from stoichiometry at each annealing temperature. The step annealed CdTe and (Cd,Zn)Te wafers have been examined under infrared microscopy and have shown significant reduction in the concentration of Te precipitates, whereas the unannealed wafers have had numerous Te precipitates distributed throughout the bulk. HgCdTe epitaxial films have been grown on the step annealed CdTe and (Cd,Zn)Te wafers as well as on unannealed wafers from the same boule. Examination of the cross sections of the epitaxial films indicates appearance of Te precipitates in films grown on unannealed substrates, whereas no Te precipitation was evident in films grown on the annealed substrates leading to the inference that the occurrence of Te precipitates in the (Hg,Cd)Te films is possibly related to the presence of Te precipitates in the substrates. Thermal migration of Te under a temperature gradient during step annealing is suggested as a possible mechanism in the elimination of larger size Te precipitates whereas the extremely fine precipitates (< 1-mu-m) appear to need in-diffusion of metal vapor for their elimination.
引用
收藏
页码:1476 / 1484
页数:9
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