IR AND DIELECTRIC STUDIES OF PLASMA-POLYMERIZED M-XYLENE THIN-FILMS

被引：6

作者：

ISLAM, O

BHUIYAN, AH

AHMED, S

机构：

[1] BANGLADESH UNIV ENGN & TECHNOL,DEPT PHYS,DHAKA 1000,BANGLADESH

[2] UNIV DHAKA,DEPT PHYS,DHAKA 1000,BANGLADESH

来源：

THIN SOLID FILMS | 1994年 / 238卷 / 02期

关键词：

Chemical reactors - Dielectric properties - Electric conductivity measurement - Film preparation - Heat treatment - Infrared spectroscopy - Microscopic examination - Microstructure - Plasma applications - Polymerization - Thin films - Xylene;

D O I：

10.1016/0040-6090(94)90054-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of m-xylene have been prepared by a plasma polymerization method using a capacitively coupled reactor. The structural investigation of the plasma-polymerized m-xylene (PPm-X) films has been carried out using polarized light microscopy and IR spectroscopy. Films are smooth and pinhole free and observed to be structurally different from m-xylene. The a.c. conductivity, dielectric constant, and dielectric loss tangent have been measured. The observed data suggest that on heat treatment the PPm-X film stabilizes. The dielectric behaviour of the films is discussed in the light of the observed data.

引用

页码：191 / 194

页数：4

共 16 条

[1]

BHAT NV, 1991, J POLYM MATER, V8, P153

[2]

BHIYAN AH, 1989, J MATER SCI, V24, P3091

[3] MOLECULAR-DIFFUSION IN PLASMA-POLYMERIZED TETRAFLUOROETHYLENE [J].