INDUCED STRESS-SENSITIVITY OF ION-BOMBARDED SILICON-METAL CONTACTS

被引:6
作者
CHINO, KI
ARIYOSHI, H
MIZUSHIMA, Y
NAKAMURA, Y
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D O I
10.1143/JJAP.9.406
中图分类号
O59 [应用物理学];
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页码:406 / +
页数:1
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[3]   RANGES OF 7.5-KEV TO 52-KEV H-2+, D2+, HE+, AND NE+ IONS IN QUARTZ [J].
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