1ST OBSERVATION OF PARAMAGNETIC NITROGEN DANGLING-BOND CENTERS IN SILICON-NITRIDE

被引:130
作者
WARREN, WL
LENAHAN, PM
CURRY, SE
机构
[1] Pennsylvania State University, University Park
关键词
D O I
10.1103/PhysRevLett.65.207
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We report the first definitive identification of nitrogen dangling bonds in silicon nitride. A computer analysis of N14 hyperfine parameters shows that the unpaired electron is strongly localized on the central nitrogen atom and that the unpaired electrones wave function is almost entirely p in character. This is only the second fundamental intrinsic electron-paramagnetic-resonance center to be identified in silicon nitride. © 1990 The American Physical Society.
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页码:207 / 210
页数:4
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