A NEW PROBE OF METALLIZATION MICROSTRUCTURE ON SEMICONDUCTOR SURFACES

被引:6
作者
HAUGSTAD, G
RAISANEN, A
SORBA, L
VANZETTI, L
YU, X
FRANCIOSI, A
机构
[1] Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, 55455, MN
[2] Istituto di Acustica O. M. Corbino del C.N.R., Via Cassia 1216, Roma
[3] Laboratorio TASC-INFM, Padriciano 99, Trieste
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 04期
关键词
D O I
10.1116/1.585713
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Synchrotron radiation photoemission spectroscopy studies of the Xe 4d core level emission from Xe atoms physisorbed on unreactive Yb-GaAs(110) and reactive Yb-Hg1-xCd(x)Te(110) interfaces allowed us to detect the presence of metallic islands and follow the coverage-dependent evolution of island composition and morphology. Measurements of local island work function, and local work function of the semiconductor surface between the islands can be performed if the ionization energy of the adsorbed Xe atoms is known a priori. We conducted systematic studies of Xe physisorption on a variety of elemental metallic films and cleaved semiconductor substrates, and found that the 4d ionization energy of the first layer Xe atoms physisorbed on metals is relatively constant (65.7 +/- 0.1 eV). On cleaved semiconductor surfaces the apparent 4d ionization energy for Xe atoms adsorbed in the first of two physisorption sites is also relatively constant, but 0.6 eV higher than that observed on metals.
引用
收藏
页码:2415 / 2422
页数:8
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