THIN SI3N4 WINDOWS FOR ENERGY-LOSS STIM IN AIR

被引：19

作者：

LEFEVRE, HW ^{[1
]}

SCHOFIELD, RMS ^{[1
]}

CIARLO, DR ^{[1
]}

机构：

[1] UNIV CALIF LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94550

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 54卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(91)95489-Z

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The use of thin (102 nm) windows of Si3N4 to transmit an electronically rastered microbeam of MeV protons into ambient air with small scattering is reported. The windows were made by anisotropic etching of Si, exposing about 1 mm2 of silicon nitride film integrally attached to a silicon supporting frame. Stress measurements on films of several thicknesses yielded a value of Young's modulus of 350 GPa. Energy loss scanning transmission ion micrographs of several small living animals are presented. Focused beams of 100 pA have been passed through the films without failure.

引用

页码：47 / 51

页数：5

共 10 条

[1] AN EMPIRICAL-TREATMENT OF NONRELATIVISTIC PROTON-BEAM SPREADING [J].

ANTOLAK, AJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 30 (02) :182-184

[2]

FERMI E, 1950, NUCL PHYS, P37

[3]

HOROWITZ P, 1978, ANN NY ACAD SCI, V306, P183

[4] EFFECTS OF STRESS ON THE STABILITY OF X-RAY MASKS [J].

KARNEZOS, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :226-229

[5]

Kelly A., 1986, STRONG SOLIDS

[6]

LEFEVRE HW, 1987, SCANNING MICROSCOPY, V1, P879

[7]

LEFEVRE HW, 1989, UCID21935 LAWR LIV N

[8] COMPLEMENTARY MICROANALYSIS OF ZN, MN AND FE IN THE CHELICERA OF SPIDERS AND SCORPIONS USING SCANNING MEV-ION AND ELECTRON-MICROPROBES [J].

SCHOFIELD, R ;

LEFEVRE, H ;

SHAFFER, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 :698-701

[9]

SCHOFIELD R, 1989, J EXP BIOL, V144, P577

[10] DIFFERENTIAL EXCITATION CURVES FROM THICK TARGET NEUTRON SPECTRA [J].

WYLIE, WR ;

BAHNSEN, RM ;

LEFEVRE, HW .

NUCLEAR INSTRUMENTS & METHODS, 1970, 79 (02) :245-+

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