OPTICAL CHARACTERISTICS OF HIGH-POWER EXCIMER LASER MIRRORS OF SINGLE-CRYSTAL ALUMINUM FILM WITH HIGH REFLECTANCE AND DURABILITY

被引：4

作者：

ADACHI, M ^{[1
]}

IKUNI, S ^{[1
]}

YAMADA, K ^{[1
]}

USUI, H ^{[1
]}

YAMADA, I ^{[1
]}

机构：

[1] KYOTO UNIV,ION BEAM ENGN EXPTL LAB,KYOTO 606,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 59卷

关键词：

D O I：

10.1016/0168-583X(91)95737-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A single-crystal Al thin film of about 200 nm thickness was epitaxially grown on a room-temperature Si(111) substrate by ICB at an ion acceleration voltage of 5 kV. The film showed Al(111) single-crystal structure. The film had high resistance against oxidation, and had high reflectance over a wide range of wavelengths in the UV and visual regions. Damage by laser beam irradiation to the ICB-Al film coated with MgF2 was measured. The damage threshold power of an acousto-optical Q-switched ArF excimer laser beam was 1.0 J/cm2. However, the damage threshold power was mainly determined by the destruction of the MgF2 film. The reflectance of the ICB deposited film is higher than the film deposited by a conventional vacuum evaporation. This could be due to the low oxidation characteristics of the single-crystal Al films. Other optical characteristics will be shown.

引用

页码：940 / 942

页数：3

共 5 条

[1] SELF-CONSISTENCY AND SUM-RULE TESTS IN THE KRAMERS-KRONIG ANALYSIS OF OPTICAL-DATA - APPLICATIONS TO ALUMINUM [J].