OPTICAL CHARACTERISTICS OF HIGH-POWER EXCIMER LASER MIRRORS OF SINGLE-CRYSTAL ALUMINUM FILM WITH HIGH REFLECTANCE AND DURABILITY

被引:4
作者
ADACHI, M [1 ]
IKUNI, S [1 ]
YAMADA, K [1 ]
USUI, H [1 ]
YAMADA, I [1 ]
机构
[1] KYOTO UNIV,ION BEAM ENGN EXPTL LAB,KYOTO 606,JAPAN
关键词
D O I
10.1016/0168-583X(91)95737-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A single-crystal Al thin film of about 200 nm thickness was epitaxially grown on a room-temperature Si(111) substrate by ICB at an ion acceleration voltage of 5 kV. The film showed Al(111) single-crystal structure. The film had high resistance against oxidation, and had high reflectance over a wide range of wavelengths in the UV and visual regions. Damage by laser beam irradiation to the ICB-Al film coated with MgF2 was measured. The damage threshold power of an acousto-optical Q-switched ArF excimer laser beam was 1.0 J/cm2. However, the damage threshold power was mainly determined by the destruction of the MgF2 film. The reflectance of the ICB deposited film is higher than the film deposited by a conventional vacuum evaporation. This could be due to the low oxidation characteristics of the single-crystal Al films. Other optical characteristics will be shown.
引用
收藏
页码:940 / 942
页数:3
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