DETECTION OF ALO MOLECULES PRODUCED BY KRF LASER-ABLATED AL ATOMS IN OXYGEN GAS AND PLASMA ENVIRONMENTS

被引:16
作者
CHING, CH [1 ]
GILGENBACH, RM [1 ]
LASH, JS [1 ]
机构
[1] UNIV MICHIGAN,DEPT NUCL ENGN,INTENSE ENERGY BEAM INTERACT LAB,ANN ARBOR,MI 48109
关键词
D O I
10.1063/1.359969
中图分类号
O59 [应用物理学];
学科分类号
摘要
Experiments have been performed to measure, in real time, the formation of AlO molecules from laser-ablated Al atoms in oxygen gas and plasma environments. The Al atom plume is generated by focusing a KrF laser (4 J/cm(2)) on Al metal targets or polycrystalline Al2O3 (alumina) ceramic. AlO molecule formation has been characterized by emission spectroscopy at 464.82 and 484.22 nm molecular bandheads. Time-integrated and time-resolved optical emissions have been measured of laser-ablated Al atoms interacting with oxygen or argon neutral-gas versus plasma backgrounds generated by a high-voltage capacitive discharge. Results indicate that gas/plasma-phase reactions occur between laser-ablated Al atoms and oxygen. Optimal enhancement of AlO optical emission is measured in oxygen plasmas at about 200 mTorr fill pressure. (C) 1995 American Institute of Physics.
引用
收藏
页码:3408 / 3410
页数:3
相关论文
共 13 条
[1]   ULTRAVIOLET-LASER-INDUCED DESORPTION OF ATOMS, IONS, AND MOLECULES FROM LITHIUM-NIOBATE [J].
AFFATIGATO, M ;
TANG, K ;
HAGLUND, RF ;
CHEN, CH .
APPLIED PHYSICS LETTERS, 1994, 65 (14) :1751-1753
[2]   ION-ASSISTED PULSED LASER DEPOSITION OF CUBIC BN FILMS ON SI (001) SUBSTRATES [J].
BALLAL, AK ;
SALAMANCARIBA, L ;
DOLL, GL ;
TAYLOR, CA ;
CLARKE, R .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (07) :1618-1620
[3]   SIO2 THIN-FILM DEPOSITION BY RADIO-FREQUENCY OXYGEN PLASMA-ENHANCED LASER-ABLATION FROM SI [J].
CHEN, TP ;
BAO, TI ;
I, L .
APPLIED PHYSICS LETTERS, 1993, 63 (18) :2475-2477
[4]  
DOLL GL, COMMUNICATION
[5]   TIME-RESOLVED EMISSION-SPECTRA OF PLASMA PRODUCED BY EXCIMER-LASER ABLATION OF BI-SR-CA-CU-O AND Y-BA-CU-O SUPERCONDUCTORS IN THE AIR [J].
ENGST, P ;
KUBAT, P ;
BOHACEK, P ;
WILD, J .
APPLIED PHYSICS LETTERS, 1994, 64 (15) :2025-2027
[6]  
GEOHEGAN DB, 1993, MATER RES SOC SYMP P, V285, P27
[7]   LASER DIAGNOSTIC EXPERIMENTS ON KRF LASER-ABLATION PLASMA-PLUME DYNAMICS RELEVANT TO MANUFACTURING APPLICATIONS [J].
GILGENBACH, RM ;
CHING, CH ;
LASH, JS ;
LINDLEY, RA .
PHYSICS OF PLASMAS, 1994, 1 (05) :1619-1625
[8]  
Glasoe G.N., 1948, PULSE GENERATORS
[9]   LASER-ABLATION-ASSISTED-PLASMA DISCHARGES OF ALUMINUM IN A TRANSVERSE-MAGNETIC FIELD [J].
LASH, JS ;
GILGENBACH, RM ;
CHING, CH .
APPLIED PHYSICS LETTERS, 1994, 65 (05) :531-533
[10]   RESONANT HOLOGRAPHIC-INTERFEROMETRY OF LASER-ABLATION PLUMES [J].
LINDLEY, RA ;
GILGENBACH, RM ;
CHING, CH .
APPLIED PHYSICS LETTERS, 1993, 63 (07) :888-890