LASER DIAGNOSTIC EXPERIMENTS ON KRF LASER-ABLATION PLASMA-PLUME DYNAMICS RELEVANT TO MANUFACTURING APPLICATIONS

被引：37

作者：

GILGENBACH, RM

CHING, CH

LASH, JS

LINDLEY, RA

机构：

[1] Intense Energy Beam Interaction Laboratory, Nuclear Engineering Department, University of Michigan, Ann Arbor

[2] Physics Department, University of Sheffield

来源：

PHYSICS OF PLASMAS | 1994年 / 1卷 / 05期

关键词：

D O I：

10.1063/1.870663

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A brief review is given of the potential applications of laser ablation in the automotive and electronics manufacturing industries. Experiments are presented on KrF laser ablation of three materials relevant to manufacturing applications: aluminum metal vs aluminum-nitride (AlN) and alumina (Al2O3) ceramics. Plasma and neutral-atom diagnostic data are presented from resonant-holographic-interferometry, dye-laser-resonance-absorption photography, and HeNe laser deflection. Data show that plasma electron densities in excess of 10(18) cm-3 exist in the ablation of AlN, with lower densities in Al and Al2O3. Aluminum neutral and ion expansion velocities are in the range of cm/mus. Ambipolar electric fields are estimated to be 5-50 V/cm.

引用

页码：1619 / 1625

页数：7

共 46 条

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