ION ENERGY-DISTRIBUTION OF KRF LASER ABLATION

被引：12

作者：

NISHIKAWA, Y

YOSHIDA, Y

TANAKA, K

机构：

[1] Production Engineering Laboratories, Matsushita Electric Industrial Co. Ltd., Matsuba-cho, Kadoma, Osaka

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1992年 / 31卷 / 4B期

关键词：

LASER ABLATION; ION ENERGY; PLASMA; EXCIMER LASER;

D O I：

10.1143/JJAP.31.L524

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The KrF laser ablation of Al, Cu, Si, and SrTiO3 targets has been studied using an electrostatic deflection energy analyzer and a quadrupole mass filter. Beam like ions appear to accompany ablation. The average kinetic energies of Si+ and metal ions are about 45 eV and 60 eV, respectively. The energies of ions are ranked in the order of Si < metal (Al, Cu)<SrTiO3. The mean ion energy of Cu+ is not affected by the laser fluence range of 2-7.5 J/cm.

引用

收藏

页码：L524 / L526

页数：3

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