TEMPERATURE-COEFFICIENT OF RESISTIVITY OF POLYCRYSTALLINE RADIO-FREQUENCY SPUTTERED ALUMINUM FILMS

被引：49

作者：

TELLIER, CR ^{[1
]}

TOSSER, AJ ^{[1
]}

机构：

[1] UNIV NANCY 1,ELECTR LAB,F-54037 NANCY,FRANCE

来源：

THIN SOLID FILMS | 1977年 / 43卷 / 03期

关键词：

D O I：

10.1016/0040-6090(77)90287-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：261 / 266

页数：6

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[9]

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[10] ELECTRICAL-RESISTIVITY MODEL FOR POLYCRYSTALLINE FILMS - CASE OF ARBITRARY REFLECTION AT EXTERNAL SURFACES [J].

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