X-RAY-LITHOGRAPHY SOURCE USING A STATIONARY SOLID PD TARGET

[1] LARGE-ANGLE L X-RAY PRODUCTION BY ELECTRONS [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (02) : 815 - 826

[2] GENERATOR FOR PRODUCING MONOENERGETIC, HIGH-INTENSITY, SOFT X-RAYS [J]. NUCLEAR INSTRUMENTS & METHODS, 1972, 102 (01): : 7 - &

[3] IMPROVED ANNULAR-SHAPED ELECTRON-GUN FOR AN X-RAY GENERATOR [J]. NUCLEAR INSTRUMENTS & METHODS, 1975, 126 (01): : 99 - 101

[4] GAMBILL WR, 1958, CHEM ENG PROG, V54, P68

[5] HERMANNSFELDT WB, 1973, SLAC166 STANF U REP

[6] HIGH-SPEED REPLICATION OF SUBMICRON FEATURES ON LARGE AREAS BY X-RAY LITHOGRAPHY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 429 - 433

[7] MAYDAN D, 1977, JUN C MICR PAR, P196

[8] MORAN JM, 1979, J VAC SCI TECHNOL, V16, P2011

[9] TAYLOR CE, 1958, UCRL5414 TECH REP

[1] LARGE-ANGLE L X-RAY PRODUCTION BY ELECTRONS [J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (02) : 815 - 826

[2] GENERATOR FOR PRODUCING MONOENERGETIC, HIGH-INTENSITY, SOFT X-RAYS [J]. NUCLEAR INSTRUMENTS & METHODS, 1972, 102 (01): : 7 - &

[3] IMPROVED ANNULAR-SHAPED ELECTRON-GUN FOR AN X-RAY GENERATOR [J]. NUCLEAR INSTRUMENTS & METHODS, 1975, 126 (01): : 99 - 101

[4] GAMBILL WR, 1958, CHEM ENG PROG, V54, P68

[5] HERMANNSFELDT WB, 1973, SLAC166 STANF U REP

[6] HIGH-SPEED REPLICATION OF SUBMICRON FEATURES ON LARGE AREAS BY X-RAY LITHOGRAPHY [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 429 - 433

[7] MAYDAN D, 1977, JUN C MICR PAR, P196

[8] MORAN JM, 1979, J VAC SCI TECHNOL, V16, P2011

[9] TAYLOR CE, 1958, UCRL5414 TECH REP