X-RAY-LITHOGRAPHY SOURCE USING A STATIONARY SOLID PD TARGET

被引:27
作者
MALDONADO, JR
POULSEN, ME
SAUNDERS, TE
VRATNY, F
ZACHARIAS, A
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期
关键词
D O I
10.1116/1.570360
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1942 / 1945
页数:4
相关论文
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