HIGH-SPEED REPLICATION OF SUBMICRON FEATURES ON LARGE AREAS BY X-RAY LITHOGRAPHY

被引：64

作者：

MAYDAN, D ^{[1
]}

COQUIN, GA ^{[1
]}

MALDONADO, JR ^{[1
]}

SOMEKH, S ^{[1
]}

LOU, DY ^{[1
]}

TAYLOR, GN ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1975年 / ED22卷 / 07期

关键词：

D O I：

10.1109/T-ED.1975.18156

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：429 / 433

页数：5

共 9 条

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