MOLECULAR SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：57

作者：

COLTON, RJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期

关键词：

D O I：

10.1116/1.570938

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：737 / 747

页数：11

共 83 条

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