DEPENDENCE OF SPUTTERING YIELD ON FOCUSSING CHAINLENGTH

被引：5

作者：

DEY, SD

BASU, D

KARMOHAPATRO, SB

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1970年 / 77卷 / 02期

关键词：

D O I：

10.1016/0029-554X(70)90090-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：242 / +

页数：1

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