MEASUREMENT OF CONTRAST CHANGES IN SCANNING ELECTRON-MICROSCOPY

被引:2
作者
SCHULSON, EM [1 ]
机构
[1] ATOM ENERGY CANADA LTD,CHALK RIVER,ONTARIO,CANADA
关键词
D O I
10.1063/1.1686134
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:348 / 349
页数:2
相关论文
共 3 条
[1]  
OATLEY CW, 1965, ADV ELECTRON ELECTRO, V21, P18
[2]  
SCHULSON EM, 1972, 5TH P EUR C EL MICR, P480
[3]   MEASUREMENT OF ION IMPLANTATION LATTICE DAMAGE IN (111) GAAS USING SCANNING ELECTRON MICROSCOPE [J].
WOLF, ED ;
HUNSPERGER, RG .
APPLIED PHYSICS LETTERS, 1970, 16 (12) :526-+